DocumentCode
993106
Title
Improved Nb-Si-Nb SNAP devices
Author
Kroger, H. ; Smith, L.N. ; Jillie, D.W. ; Thaxter, J.B.
Author_Institution
Sperry Research Center, Sudbury, MA, USA
Volume
19
Issue
3
fYear
1983
fDate
5/1/1983 12:00:00 AM
Firstpage
783
Lastpage
786
Abstract
We have compared the tunneling characteristics of Nb-Si-Nb junctions whose amorphous silicon barriers have been sputtered in pure Ar with those sputtered Ar-H2 plasmas as well as in various combinations. We observe lower subgap currents with composite barriers which comprise a central region which is hydrogenated but which is sandwiched between two thin unhydrogenated layers. The improved tunneling characteristics may be associated with the lower density of localized states in the hydrogenated silicon.
Keywords
Amorphous semiconductor materials/devices; Josephson devices; Silicon materials/devices; Amorphous silicon; Argon; Electrodes; Niobium; Oxidation; Plasma density; Plasma devices; Plasma properties; Reflectivity; Tunneling;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1983.1062286
Filename
1062286
Link To Document