Title :
Temperature-Oriented Experiment and Simulation as Corroborating Evidence of MOSFET Backscattering Theory
Author :
Chen, Ming-Jer ; Yan, Shih-Guei ; Chen, Rong-Ting ; Hsieh, Chen-Yu ; Huang, Pin-Wei ; Chen, Han-Ping
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu
Abstract :
The MOSFET backscattering theory relies on a so-called "kB T" layer. In this letter, we adopt two different approaches to examine the temperature dependencies of the width spanned by this critical zone. First of all, a 55-nm channel length n-MOSFET is extensively characterized at three temperatures of 233 K, 263 K, and 298 K while undergoing a parameter decoupling/transformation process. A unique relationship is straightforwardly created and is comparable with that in the literature: The width of the "kBT" layer is proportional to the square root of temperature. The case of 77 K is also projected. Other corroborating evidence is a Monte Carlo particle simulation conducted on an 80-nm-long silicon conductor with the "kBT" layer\´s width proportional to the temperature in the high field region. Without adjusting any parameters, the backscattering theory is shown to work well for the demonstrated temperatures down to 77 K
Keywords :
MOSFET; Monte Carlo methods; electron backscattering; nanoelectronics; semiconductor device models; 233 K; 263 K; 298 K; 55 nm; 77 K; 80 nm; MOSFET; Monte Carlo particle simulation; backscattering theory; kBT layer width; parameter decoupling; silicon conductor; temperature dependence; transformation process; Backscatter; Conductors; MOSFET circuits; Monte Carlo methods; Silicon; Strain measurement; Temperature dependence; Temperature distribution; Temperature measurement; Voltage; Backscattering; MOSFET; nanoscale; scattering;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2006.889504