Title :
p-type silicon drift detectors: first results
Author :
Wang, N.W. ; Krieger, B. ; Krofcheck, D. ; Lewak, D. ; Naudet, C.J. ; Donnell, R.O. ; Odyniec, G. ; Partlan, M. ; Rudolph, H.W. ; Walton, J.T. ; Wilson, W.K.
Author_Institution :
Lawrence Berkeley Lab., CA, USA
fDate :
8/1/1995 12:00:00 AM
Abstract :
We have fabricated a 4 cm×4 cm, position-sensitive silicon drift detector using high purity, p-type silicon as the substrate. In this paper, we describe the double-sided planar process used to fabricate the detectors and the strategy used to suppress surface carrier inversion due to the presence of fixed positive charge at the Si-SiO2 interface. The key issue in optimizing the fabrication process has been to minimize leakage currents and prevent breakdown at low voltages. Tests show that a drift signal can be measured across the entire length of the detector and that the transit time of the holes varies linearly with the position of the induced charge signal
Keywords :
leakage currents; position sensitive particle detectors; silicon radiation detectors; 4 cm; Si; Si drift detectors; Si-SiO2; Si-SiO2 interface; breakdown; double-sided planar process; fabrication; high purity; holes; leakage currents; p-type; position-sensitive; surface carrier inversion; Breakdown voltage; Charge measurement; Current measurement; Fabrication; Leakage current; Length measurement; Low voltage; Position sensitive particle detectors; Silicon; Testing;
Journal_Title :
Nuclear Science, IEEE Transactions on