• DocumentCode
    995602
  • Title

    Contact resistivity of IR lamp alloyed Au-Ge metallisation on GaAs

  • Author

    Gill, Sandeep Singh ; Dawsey, J.R. ; Cullis, A.G.

  • Author_Institution
    Royal Signals & Radar Establishment, Malvern, UK
  • Volume
    20
  • Issue
    22
  • fYear
    1984
  • Firstpage
    944
  • Lastpage
    945
  • Abstract
    A rapid infra-red (IR) lamp system used to alloy Au-Ge ohmic contacts to n-GaAs has yielded specific contact resistivity a factor of 3 lower than achieved by conventional graphite strip heater. In this initial study temperatures between 430 and 445°C and alloying times of 1 to 5 s have produced the best results.
  • Keywords
    contact resistance; germanium alloys; gold alloys; metallisation; ohmic contacts; 430°C to 445°C; Au-Ge; IR lamp; alloying times; contact resistivity; metallisation; n-GaAs; ohmic contacts;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19840642
  • Filename
    4249154
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=995602