• DocumentCode
    997015
  • Title

    Test Sequencing in Complex Manufacturing Systems

  • Author

    Boumen, R. ; De Jong, I. S M ; Vermunt, J. W H ; van de Mortel-Fronczak, J.M. ; Rooda, J.E.

  • Author_Institution
    Eindhoven Univ. of Technol., Eindhoven
  • Volume
    38
  • Issue
    1
  • fYear
    2008
  • Firstpage
    25
  • Lastpage
    37
  • Abstract
    Testing complex manufacturing systems, such as an ASML lithographic machine, takes up to 45% of the total development time of a system. The problem of which tests must be executed in what sequence to ensure in the shortest possible test time that the system works, which is the test-sequencing problem, was already solved by Pattipati et al. for the diagnosis of systems during operation. Test-sequencing problems during the development and manufacturing phases of systems, however, require a different approach than the test-sequencing problems during operation. In this paper, the test problem description and algorithms developed by Pattipati et al. are extended to solve test-sequencing problems for the development and manufacturing of manufacturing systems. For a case study in the manufacturing process of an ASML lithographic machine, it is shown that solving a test-sequencing problem with this method can reduce the test time by 15% to 30% compared to experts that solve this problem manually.
  • Keywords
    integrated circuit manufacture; lithography; manufacturing systems; production equipment; production testing; ASML lithographic machine; complex manufacturing systems; test sequencing; Electronics industry; Lithography; Manufacturing industries; Manufacturing processes; Manufacturing systems; Semiconductor device testing; Sequential analysis; Sequential diagnosis; System testing; Time to market; and/or graphs; AND/OR graphs; TANGRAM; manufacturing systems; semiconductor industry; test sequencing; test strategy;
  • fLanguage
    English
  • Journal_Title
    Systems, Man and Cybernetics, Part A: Systems and Humans, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1083-4427
  • Type

    jour

  • DOI
    10.1109/TSMCA.2007.909494
  • Filename
    4395096