DocumentCode
998601
Title
GaAs f.e.t.s with graded channel doping profiles
Author
Williams, R.E. ; Shaw, D.W.
Author_Institution
Texas Instruments Incorporated, Dallas, USA
Volume
13
Issue
14
fYear
1977
Firstpage
408
Lastpage
409
Abstract
Graded-channel GaAs f.e.t.s with the carrier concentration decreasing from the substrate¿epitaxial interface outwards are observed to exhibit more linear d.c. transfer characteristics, higher reverse gate breakdown voltages and lower 3rd-order intermodulation products than f.e.t.s fabricated from companion slices with uniform or flat doping profiles.
Keywords
field effect transistors; gallium arsenide; semiconductor doping; vapour phase epitaxial growth; GaAs FETs; fabrication; graded channel doping profiles; higher reverse gate breakdown voltages; linearised DC transfer characteristics; reduced third order intermodulation products;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19770297
Filename
4249450
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